13 slot ✓ 13 - Slot Block-2263 - Chef Jean-Pierre's

13 slot
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13 slot13 slots type can store glass carrier and Thin wafer CKplas H300H313 FOUP series of product line fully align with SEMI standard of automation interface,

13 slot Supported Versions: Current 15 14 13 12 The process ID of the session using this slot if the slot is currently actively being used